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Methods and apparatus for reducing post PECVD vacuum and abatement system fouling. Chamber cleaning times are reduced leading to increased efficiency and lowe

at Capacitive Currents Switching-off by Vacuum and SF6

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System and method for collecting and refining SF6 gas

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Appendix to Chapter 1 - Advances in High Voltage Insulation and Arc Interruption in SF6 and Vacuum《Advances in High Voltage Insulation Arc Interruption

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